パターン照明を用いたフイルム表面凹凸欠陥の検出(第2報) : 光学シミュレーションによる欠陥検出評価

概要

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This paper describes a validation of the detection system with patterned illumination for convexo-concave defects on optical films by using the ray tracing method. The method is based on a phenomenon that stripe patterns in a reflected image are locally blurred by the existences of their defects. The high-contrast repetition pattern such as stripe is effective. The detection algorithm proposed in the previous report is shown briefly. Then, the ray tracing method is applied to the estimation of images reflected from the films. The estimated images are very much in accord with the experimental ones. By estimating in various conditions including defect size and optical arrangement, optimum pattern spacing is found.
社団法人精密工学会の論文
2001-07-05