マイクロマシン用ランプ加熱型減圧CVDの成膜特性研究 : ポリシリコン膜の電気的特性とくし歯型モータの試作

概要

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The development of prototype of a new LPCVD using lamp heating and its study of the characteristics of polysilicon film deposited using this new LPCVD were reported. When a micro machine is produced using polysilicon film deposited with this equipment, we will need to know the electrical characteristic of this film. In the electrical characteristic, this time the resistivity and gage factor of boron doped polysilicon film deposited by a new LPCVD were measured. The comb motor as its application was tried to produce. The result of this study are summarized as follows; (1)The resisitivities of boron doped polysilicon are in range of 0.01-0.07Ωcm. These values of resistivity are available for micromachine devices as a micro actuator etc. (2) The gage factor of boron doped polysilicon are in range of 10-80. These values of gage factor are available for sensor device. (3) The trial production of comb motor was made and controlled in the displacement of 0-12.2μm with O〜220V.
公益社団法人精密工学会の論文
2000-09-05