高アスペクト比フォトレジストを用いた厚膜平面らせん型マイクロ電磁気距離センサの開発

概要

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To maintain metal pipes, an electromagnetic coil is useful as the detecting device of the eddy current change in the metal due to the pipe defects and as the distance sensor of the clearance between the detecting device and metal wall. This type of sensor should be thin and smaller diameter for detecting by precise resolution and have large inductance and, small electrical resistance for high sensitivity and high S/N. In this paper, for the above requirements, a new planar spiral type of coil for higher inductance, and thicker coil for reducing the electrical resistance by using ultra thick photo resist SU-8 and Ni electroplating is proposed. Moreover the micromachining technology for the small size diameter and for automatic assembling was applied to the microcoil fabrication. As the results, the Ni microcoil of thickness 300μm and of the diameter 3mm was fabricated. The high sensitivity, big signal-to-noise ratio and wide bandwidth of the fabricated sensor were obtained to be 1.7V/mm, 75.6dB and 0Hz to 1500Hz, respectively. The distance between the sensor and metal could be controlled using the microcoil distance sensor.
公益社団法人精密工学会の論文
2001-05-05