二重駆動精密ロボットに関する研究

概要

論文の詳細を見る
A new mechanism using DC servo motor for coarse motion control and piezo-electric actuator for fine motion control has been developed. This dual-drive system is capable of controlling robot's motion with relative accuracy in the order of 10^<-6>. A robot with two degree of freedom using this dual-drive system has been developed and tested. Experimental results indicate that the positioning accuracy is ±0.5μm for PTP motion and ±0.1μm for CP motion. The piezo-electric actuator is used not only for fine positioning but also for absorbing residual vibration of the coarse actuator. PID feedback control of position error is used and an efficient method for determining the feedback gains is proposed. Experimental results show that this control method is effective for high speed and high accuracy motion control of a precision robot.
公益社団法人精密工学会の論文
1991-05-05