CCD水平設置型非接触距離センサの結像性

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The distance measuring sensor proposed has a lens system based on an astronomical telescope type with the fixed distance between lens L_1 and L_2 to the sum of focal lengths, f_1+f_2. Through the optical system, an object point P_s(γ_s, θ_s, Ζ_<s1>) in the object space which is measured from the front focal point F_<11> of L_1 is converted linearly into a real inverted image point P_r(γ_r, θ_r, Ζ_<r2>)measured from the rear focal point F_<22> of L_2 in the image space ; that is {(f_2/f_l)γ_s, θ_s+π, -(f_2/f_1)^2Ζ_<s1>}. In order to know Z_<s1> of the laser beam spot on an object Z_<r2> is to be detected, then the sensor has 1-D CCD placed horizontally so that it makes the pixel line in alignment with the optical axis, as is the case of the laser beam axis. The problem is what aspects of image formation occurs on such an unusual horizontal plane, when a laser beam spot on the object has a finite size of diameter under other conditions such as distance Z_<s1> object surface orientation, misalignment of CCD and so on. The paper discusses this problem, examining through spot diagrams and illumination intensity distributions of the image formed by optical computing, by means of ray-tracing method and by applying a multi-point-source model to the beam spot. As conclusions, the peak location of computed illumination intensity for the image corresponds to the theoretical whatever height and form of the peak is affected by Z_<s1> and object surface orientation, provided that each alignment in the optical system is ideally perfect.
公益社団法人精密工学会の論文
1989-05-05

CCD水平設置型非接触距離センサの結像性

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