AC リニアモータと転がり案内を用いたナノメータ位置決め(第2報) : 転がり案内のトライボロジー

概要

論文の詳細を見る
Tribolgy and micro-dynamics of a one-axis stage mechanism guided by a rolling ball guide, which achieved nanometer positioning, are studied. The force-to-displacement relationship consists of three displacement regions. In the first region of less than 100 nm displacement, the balls of the guide act as a linear spring. In the third region of over 100 μm displacement, normal rolling takes place. The second region has characteristics intermediate between those of first and the third. Static and dynamic regional transitions between these three are studied. Changes of the characteristics are measured for different positions and different load pressures. The force-to-velocity relationship of the guide is measured. Suitability of the rolling guide to fine positioning is discussed.
公益社団法人精密工学会の論文
1991-10-05