ヘッドオン型Ar_2^, Kr_2^エキシマ光照射装置の特性

概要

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As an application of dielectric barrier discharge(DBD) lamps, vacuum-ultraviolet(VUV) exposure systems of both Ar_2^* and Kr_2^* excimers have been developed and their basic performance has been evaluated. Each system comprises a 20-WDBD excimer lamp, a sinusoidal wave high-voltage power supply, and a cylindrical lamp holder. A high-voltage transformer and a lamp are designed to be set as close together as possible in the holder. The inside of the holder is purged by nitrogen gas when it is in use. The excimer lamp has an MgF_2^* window at the lamp end and is a "head-on type" lamp. The head-on type Ar_2^* excimer VUV system produced monochromatic light at 127nm(with a 9.8nm FWHM). It's irradiance had an almost homogeneous distribution within a 15-nm diameter planar circle at 50mm from the output window and was about 0.4mW/cm^2. The head-on type Kr_2 excimer VUV system produced monochromatic light at 147nm(with a 13.2-nm FWHM). It's irradiance had an almost homogeneous distribution within a 15-mm diameter planar circle at 50mm from the output window and was about 1.4mW/cm^2. The lifetime of the lamps in these system is defined as the time point at which irradiance drops to 50% of its initial value. It was 500 and 1500 h, respectively, for the Ar_2^* and Kr_2^* excimer lamps.
2000-05-01