多層膜反射鏡の宇宙 X 線観測器への応用

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Development of multilayer reflectors makes it possible to apply to the grazing and normal incidence X-ray optic system for the cosmic X-ray observation in 0.1-10keV region. For the grazing incidence X-ray telescope, multilayer reflectors have an advantage to make larger the glancing angle and to extend the energy range up to 10keV in the fixed configuration. The normal incidence X-ray telescope is attainable in the energy range below 0.4keV, though the sensitive energy band is limited by Bragg condition estimated from the layer thickness and the number of layer pairs. Multilayers are also useful optical elements to fabricate the X-ray spectrometer and polarimeter. We are fabricating multilayer reflectors with electron beam evaporation method in ultra-high vacuum. Material combinations are Mo/C, Mo/Si and Ni/C with 5-20 layer pairs and the layer thickness of 31-100A. They are deposited on flat and figured substrates of float glass and superpolished glass with the surface roughness of 2-3A (rms). Multilayers thus fabricated are evaluated by measuring the reflectivity, the wavelength resolution and Bragg angle with three characteristic X-rays of Cu-Kα(1.54A), Si-Kα(7.13A) and C-Kα(44.7A). Further investigations are carried out with the monochromatized synchrotron radiation in 14-250A band. The peak reflectivity of Cu-Kα is obtained to be 80% for Mo/C in the grazing incidence and that of λ160A to be more than 30% for Mo/Si in near normal incidence.
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多層膜反射鏡の宇宙 X 線観測器への応用

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