<論文>よどみ流平面火炎によるダイヤモンド薄膜の燃焼合成

概要

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In order to make clear the mechanism of combustion synthesis of diamond films, an experimental study to synthesize diamond films has been conducted under a well-defined stagnation flow field. The experiment has been carried out using a flat flame burner, with acetylene/hydrogen/oxygen premixed inner flames stabilized approximately 1 mm under deposition substrates. In this process, uniform polycrystalline diamond films have been synthesized on substrates, the area of each film being the same as that of the flat inner flame (〜 7 mm in diameter). Having examined influences of equivalence ratios (φ) and velocity gradients (a) on a growth rate of diamond films, it has been found that when the velocity gradient is kept at a constant rate, the growth rate comes to keep constant. From this viewpoint, it can be said that thickness of the boundary layer is an important factor for the growth rate of diamond films. Added to this, it has also been proved that the distribution map of the growth rate as a function of equivalence ratio and velocity gradient indicates that the maximum growth rate is 24 μm/h at φ= 2.70 and a = 4000 s^<-1>.
沼津工業高等専門学校の論文
2002-01-31