Application of a Nano-Mechanical Sensor to Monitor Stress in Copper Damascene Interconnects
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2009-09-25
著者
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Horsfall Alton
School Of Electrical Electronic And Computer Engineering Newcastle University
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WILSON Christopher
School of Electrical, Electronic, and Computer Engineering, Newcastle University
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CROES Kristof
IMEC
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TOKEI Zsolt
IMEC
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VEREECKE Bart
IMEC
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BEYER Gerald
IMEC
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Croes Kristof
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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T{o}kei Zsolt
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Vereecke Bart
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Beyer Gerald
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Wilson Christopher
School Of Electrical Electronic And Computer Engineering Newcastle University
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O'neill Anthony
School Of Electrical Electronic And Computer Engineering Newcastle University
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Tokei Zsolt
Imec, Kapeldreef 75, Leuven B-3001, Belgium
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- Application of a Nano-Mechanical Sensor to Monitor Stress in Copper Damascene Interconnects
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