Tokei Zsolt | Imec, Kapeldreef 75, Leuven B-3001, Belgium
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概要
関連著者
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Tokei Zsolt
Imec, Kapeldreef 75, Leuven B-3001, Belgium
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Vereecke Bart
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Horsfall Alton
School Of Electrical Electronic And Computer Engineering Newcastle University
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WILSON Christopher
School of Electrical, Electronic, and Computer Engineering, Newcastle University
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CROES Kristof
IMEC
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TOKEI Zsolt
IMEC
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VEREECKE Bart
IMEC
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BEYER Gerald
IMEC
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Koike Junichi
Department Of Materials Science Graduate School Of Engineering Tohokuuniversity
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Croes Kristof
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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T{o}kei Zsolt
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Beyer Gerald
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Wilson Christopher
School Of Electrical Electronic And Computer Engineering Newcastle University
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O'neill Anthony
School Of Electrical Electronic And Computer Engineering Newcastle University
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Phuong Nguyen
Department of Electrical, Electronic and Information Engineering, Nagaoka University of Technology, Kamitomioka, Nagaoka, Niigata 940-2188, Japan
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Phuong Nguyen
Department of Materials Science, Tohoku University, Sendai 980-8579, Japan
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Wilson Christopher
Imec, Kapeldreef 75, Leuven B-3001, Belgium
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Ablett James
Synchrotron Soleil, L'orme des Merisiers, Saint-Aubin, BP 48, Gif-sur-Yvette F-91192, France
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Sterbinsky George
National Institute for Standards and Technology, Gaithersburg, MD 20899, U.S.A.
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Woicik Joseph
National Institute for Standards and Technology, Gaithersburg, MD 20899, U.S.A.
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Ablett James
Synchrotron Soleil, L'orme des Merisiers, Saint-Aubin, BP 48, Gif-sur-Yvette F-91192, France
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Vereecke Bart
imec, Kapeldreef 75, Leuven, B-3001, Belgium
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Kashiwagi Yusaku
Tokyo Electron Ltd., Technology Development, Tsukuba, Ibaraki 305-0841, Japan
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Veen Marleen
imec, Kapeldreef 75, Leuven, B-3001, Belgium
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Ke Xiaoxing
EMAT, University of Antwerp, Groenenborgerlaan 171, B-2020 Antwerp, Belgium
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Hantschel Thomas
imec, Kapeldreef 75, Leuven, B-3001, Belgium
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Sugiura Masahito
Tokyo Electron Ltd., Technology Development, Tsukuba, Ibaraki 305-0841, Japan
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Cott Daire
imec, Kapeldreef 75, Leuven, B-3001, Belgium
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Huyghebaert Cedric
imec, Kapeldreef 75, Leuven, B-3001, Belgium
著作論文
- Application of a Nano-Mechanical Sensor to Monitor Stress in Copper Damascene Interconnects
- Characterization of Chemically Vapor Deposited Manganese Barrier Layers Using X-ray Absorption Fine Structure
- Wafer-Level Electrical Evaluation of Vertical Carbon Nanotube Bundles as a Function of Growth Temperature