Temperature Control and Packaging Optimization of the Integrated Hydrogen Sensor
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概要
- 論文の詳細を見る
An integrated sensor chip combining a heater for temperature control and a diode for temperature monitoring was fabricated and its characteristics evaluated. Furthermore, a new packaging structure with a gas permeable film and sensor chip attached to the glass to improve the heat efficiency were developed. Using this packaging structure, the optimum working conditions and protection for the sensor chip were realized. The features of the diode were sufficient to verify the sensor temperature. In terms of the value of heat efficiency per power consumption, we succeeded in advancing its values by about 15% compared to the glassless type. Furthermore, the time response curves for the sensor temperature and power consumption of the heater were measured. The thermal control system consists of a heater and the diode was successfully utilized to maintain the intended temperature. The heat efficiency was improved by attaching a glass and this system was found to be useful for the PPG-FET type hydrogen sensor.
- 社団法人 電気学会の論文
- 2009-09-01
著者
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YAMAGUCHI Tomiharu
Graduate School of Natural Science and Technology, Okayama University
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KIWA Toshihiko
Graduate School of Natural Science and Technology, Okayama University
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TSUKADA Keiji
Graduate School of Natural Science and Technology, Okayama University
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Tsukada K
Natural Science And Technology Okayama University
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Tsukada Keiji
Graduate School Of Natural Science And Technology Okayama University
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Tsukada K.
Graduate School Of Natural Science And Technology Okayama University
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Tsukada Keiji
Graduate School Of Natural Sci. And Technol. Okayama Univ.
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Tsukada Keiji
Department Of Electrical And Electronic Engineering Okayama University
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Tsukada Keiji
Superconducting Sensor Laboratory
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Tsukada Keiji
Central Research Laboratory Hitachi Ltd.
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Kiwa Toshihiko
Graduate School Of Natural Sci. And Technol. Okayama Univ.
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Tsukada Keiji
Hitachi Ltd. Tokyo Jpn
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TSUBOTA Kousuke
Graduate School of National Science and Technology, Okayama University
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YAMADA Hironobu
Graduate School of National Science and Technology, Okayama University
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KONDO Yohei
Sharp Takaya Electronic Industry Co., Ltd.
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IMAJO Hirofumi
Sharp Takaya Electronic Industry Co., Ltd.
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HONDO Tsutomu
Sharp Takaya Electronic Industry Co., Ltd.
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MAEHARA Tunetoshi
Phenitec semiconductor Co., Ltd.
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YAMAMOTO Tadayoshi
Phenitec semiconductor Co., Ltd.
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Yamaguchi Tomiharu
Graduate School Of Natural Science And Technology Okayama University
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Kondo Yohei
Sharp Takaya Electronic Industry Co. Ltd.
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Hondo Tsutomu
Sharp Takaya Electronic Industry Co. Ltd.
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Tsukada K
Superconducting Sensor Lab. Chiba
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Imajo Hirofumi
Sharp Takaya Electronic Industry Co. Ltd.
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Yamada Hironobu
Graduate School Of Natural Science And Technology Okayama University
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Tsubota Kousuke
Graduate School Of National Science And Technology Okayama University
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Maehara Tunetoshi
Phenitec Semiconductor Co. Ltd.
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Kiwa Toshihiko
Okayama Univ. Okayama Jpn
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Yamamoto Tadayoshi
Phenitec Semiconductor Co. Ltd.
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