Evaluation of the Sensitivity of Hydrogen Sensors Covered with Polytetrafluoroethylene as a Protective Membrane for Humidity
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概要
- 論文の詳細を見る
Environmental factors such as dust adsorption effects and humidity generally result in drifts of the sensor output signal and lead to malfunctions of the sensor and/or reduction in sensitivity. So a sensor package is necessary to protect hydrogen sensors in order to operate the sensors in an actual use environment. In this study, a Pt-FET hydrogen sensor covered with a polytetrafluoroethylene (PTFE) porous membrane was developed. The PTFE porous membrane with different pore sizes of 5 μm, 20 μm, and 30 μm was applied and the effects of humidity on sensor sensitivity were evaluated. The results indicate the effects of humidity on the sensitivity were reduced in the relative humidity range between 20% and 80% for the sensor with the 5-μm porous membrane.
- 2010-08-01
著者
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FUJII Koji
Graduate School of Natural Science and Technology, Okayama University
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INOUE Hirotsugu
Graduate School of Natural Science and Technology, Okayama University
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YAMAGUCHI Tomiharu
Graduate School of Natural Science and Technology, Okayama University
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KIWA Toshihiko
Graduate School of Natural Science and Technology, Okayama University
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TSUKADA Keiji
Graduate School of Natural Science and Technology, Okayama University
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KARIYA Masatoshi
Graduate School of Natural Science and Technology, Okayama University
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MIZUHARA Kouhei
Graduate School of Natural Science and Technology, Okayama University
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Tsukada K
Natural Science And Technology Okayama University
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Tsukada Keiji
Graduate School Of Natural Science And Technology Okayama University
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Tsukada K.
Graduate School Of Natural Science And Technology Okayama University
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Tsukada Keiji
Graduate School Of Natural Sci. And Technol. Okayama Univ.
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Tsukada Keiji
Department Of Electrical And Electronic Engineering Okayama University
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Tsukada Keiji
Superconducting Sensor Laboratory
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Tsukada Keiji
Central Research Laboratory Hitachi Ltd.
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Kiwa Toshihiko
Graduate School Of Natural Sci. And Technol. Okayama Univ.
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Tsukada Keiji
Hitachi Ltd. Tokyo Jpn
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Yamaguchi Tomiharu
Graduate School Of Natural Science And Technology Okayama University
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Tsukada K
Superconducting Sensor Lab. Chiba
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Inoue Hirotsugu
Graduate School Of Natural Science And Technology Okayama University
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Inoue Hirotsugu
Graduate School Of Natural Sci. And Technol. Okayama Univ.
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Fujii Koji
Graduate School Of Natural Science And Technology Okayama University
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Kiwa Toshihiko
Okayama Univ. Okayama Jpn
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