Thickness Dependence of the Dielectric Properties of Epitaxial SrTiO3 Films on (001)Pt/SrTiO3
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概要
- 論文の詳細を見る
Epitaxial, (001)-oriented SrTiO3 thin films were grown by sputtering on (001)Pt/SrTiO3 substrates to thicknesses ranging from 20 to 160 nm. Their dielectric properties were studied using parallel-plate capacitor structures. For film thicknesses greater than 40 nm, the thickness dependence of the capacitance density could be described with a model of low-permittivity interfacial layers that are connected in series with the bulk of the film. Thinner films showed a deviation from the linear relationship between the inverse capacitance density and thickness. They also showed an increase in loss and a small, power-law frequency dependence of the capacitance. These changes were indicative of different bulk dielectric properties of the thinnest SrTiO3 films.
- Japan Society of Applied Physicsの論文
- 2008-09-25
著者
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Lebeau James
Materials Department University Of California
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Stemmer Susanne
Materials Department University Of California
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Boesch Damien
Materials Department, University of California, Santa Barbara, CA 93106-5050, U.S.A.
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Son Junwoo
Materials Department, University of California, Santa Barbara, CA 93106-5050, U.S.A.
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Cagnon Joël
Materials Department, University of California, Santa Barbara, CA 93106-5050, U.S.A.
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Son Junwoo
Materials Department University Of California
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Boesch Damien
Materials Department University Of California
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Cagnon Joel
Materials Department University Of California
関連論文
- Thickness Dependence of the Dielectric Properties of Epitaxial SrTiO3 Films on (001)Pt/SrTiO3
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