陽極酸化プロセスによるアルミナナノホールアレーの作製と表面ナノ構造制御への応用

概要

論文の詳細を見る
The fabrication of functional surfaces with fine ordered structures from submicron to nanometer scales has attracted increasing attention due to its application in various fields. In the present report, fabrication of several types of functional ordered surfaces based on the highly ordered anodic porous alumina are described. Anodic porous alumina, which is formed by anodization of Al in acidic electrolyte, is a typical self-ordered material and is promising candidate for the nanofabrication. As typical example of the fabrication of ordered surfaces, the highly ordered structures of the anodic porous alumina could be applied to the mask processes, in which the metal dot arrays or hole arrays are formed on the substrates. Some typical examples of the application of the obtained ordered surfaces were also described
日本真空協会の論文
2009-04-20