Nitride Films Preparation by Pulsed Laser Deposition with Plasma Plume Ion Implantation
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概要
- 論文の詳細を見る
- 1998-10-09
著者
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Ikegami Tomohiro
Department Of Electronic. Engineering Faculty Of Engineering Gunma University
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Yamagata Y
Department Of Electrical And Computer Engineering Kumamoto University
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Ebihara K
Graduate School Of Science And Technology Department Of Electrical And Computer Engineering Kumamoto
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Maruta Kazuhiko
Kumamoto University
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YAMAGATA Yukihiko
Department of Electrical and Computer Engineering, Kumamoto University
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IKEGAMI Tomoaki
Kumamoto University
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YAMAGATA Yukihiko
Kumamoto University
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EBIHARA Kenji
Kumamoto University
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Ikegami Takeshi
Graduate School of Science and Technology, Department of Electrical and Computer Engineering, Kumamoto University
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