High-Voltage 4H-SiC RESURF MOSFETs Processed by Oxide Deposition and N_2O Annealing
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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KAWANO Hiroaki
Dept. of Cardio.,Juntendo Univ.,int. Medi.
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Kawano Hiroaki
Dept. Of Electronic Sci. & Eng. Kyoto University
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KIMOTO Tsunenobu
Dept. of Electronic Sci. & Eng., Kyoto University
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NOBORIO Masato
Dept. of Electronic Sci. & Eng., Kyoto University
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SUDA Jun
Dept. of Electronic Sci. & Eng., Kyoto University
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NOBORIO Masato
Department of Electronic Science and Engineering, Kyoto University
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Kawano Hiroaki
Dept. Of Cardio. Juntendo Univ. Int. Medi.
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Noborio Masato
Department Of Electronic Science And Engineering Kyoto University
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