Interface States due to Intrinsic Defects in Si(100)/SiO_2
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Kaneta Chioko
Fujitsu Laboratories Limited
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TERAKURA Kiyoyuki
JRCAT-NAIR
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YAMASAKI Takahiro
Fujitsu Laboratories Limited
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UCHIYAMA Toshihiro
JRCAT-ATP
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UDA Tsuyoshi
JRCAT-ATP
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Terakura Kiyoyuki
Jrcat Central 4:national Institute Of Advanced Industrial Science And Technology Research Institute
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- Interface States due to Intrinsic Defects in Si(100)/SiO_2
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