A High Pressure High Temperature Poly Buffer LOCOS (HP-HTPBL) Isolation Process for 1Gbit Density Non Volatile Memories
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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DELEONIBUS S.
CEA-LETI
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MARTIN F.
CEA/DRT-LETI
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DELEONIBUS S.
CEA/DRT-LETI
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Kim S.
Gasonics International
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Leroux C.
Leti(cea) Dept De Microelectronique
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Emami A.
Gasonics International
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DELEONIBUS S.
LETI(CEA) Dept de Microelectronique
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MARTIN F.
LETI(CEA) Dept de Microelectronique
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FLORIN B.
LETI(CEA) Dept de Microelectronique
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HEITZMANN M.
LETI(CEA) Dept de Microelectronique
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Heitzmann M.
Leti(cea)
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