鏡面反射成分を考慮したオリフィス通過確率のモンテカルロシミュレーション

概要

論文の詳細を見る
Some parts of gas molecules reflect in specular direction after hitting a wall. In order to determine the conductance of an orifice accurately for vacuum standard and pumping speed measurement by orifice flow method, transmission probability of an orifice was calculated by Monte Calro simulation taking account of the specular reflection of gas molecules on its inner surface. If 10% of gas molecules are assumed to suffer specular reflection on the wall, the probability increases only 0.05% for the orifice of which thickness is 0.01 of its radius, while 0.5% for 0.1. The orifice should be thin, since it is not realistic to determine the amount of specular reflection. The thickness should be measured accurately to determine probability with high accuracy. The radius should be also measured to determine the rate of incidence of gas in the orifice with high accuracy.
日本真空協会の論文
2005-10-20