Novel Extraction Method for Size-Dependent Mobility Based on BSIM3-Like Compact Model

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2005-04-30

著者

• Tanaka Takuji

  Fujitsu Ltd.

• TANAKA Takuji

  Advanced LSI Development Division, FUJITSU Limited

• GOTO Ken-ichi

  Advanced LSI Development Division, FUJITSU Limited

• NAKAMURA Ryou

  Advanced LSI Development Division, FUJITSU Limited

• SATOH Shigeo

  Advanced LSI Development Division, FUJITSU Limited

• GOTO Ken-ichi

  FUJITSU Ltd.

• NAKAMURA Ryou

  FUJITSU Ltd.

• Tanaka Takuji

  Advanced Lsi Development Division Fujitsu Limited

関連論文

• Novel Extraction Method for Size-Dependent Mobility Based on BSIM3-Like Compact Model
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• Direct measurement of the offset spacer effect on the carrier profiles in sub-50nm p-MOSFETs
• Characterization of Plasma Nitridation Impact on Lateral Extension Profile in 50 nm N-MOSFET by Scanning Tunneling Microscopy

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