高周波放電プラズマにおける基板への熱流束と電力測定

概要

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We performed measurement of the radio frequency power and temperature of electrodes and plasma parameters of rf discharge. The purpose of this research is checking the accuracy of the measurement of energy consumed in plasmas. The heat energy in plasma was obtained by heat flux that was calculated from substrate temperature. The temperature was measured by the laser interferometer using the LiNbO3 crystal. In the case of 2 cm and 3 cm and 4 cm electrode spacing, the heat energy toward electrodes was 7.7 W and 5.4 W and 4.0 W, respectively. The current and voltage measurement was made at the driven electrode. The input power was 8.2 W and 5.1 W and 7.7 W for the electrode spacing 2 cm and 3 cm and 4 cm, respectively. The heat energy calculating based on the electron density distribution measured was conducted by estimating the Bohm flux and ambipoler diffusion flux. It was found that the heat energy toward electrodes was 1.4 W and 1.8 W and 1.5 W for the electrode spacing 2 cm and 3 cm and, 4 cm, respectively, and the heat toward the wall was negligible.
社団法人電気学会の論文
2005-03-01