Sensitivity Characteristics of Positive and Negative Resists at 200kV Electron-Beam Lithography
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2005-02-10
著者
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KIM Ki-Bum
School of Life Sciences and Biotechnology, Korea University
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Kim Ki-bum
School Of Life Sciences And Biotechnology Korea University
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Kim Ki-bum
School Of Materials Science And Engineering And Nano Systems Institute-national Core Research Center
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Wi Jung-sub
School Of Materials Science And Engineering And Nano Systems Institute-national Core Research Center
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Jin Kyung-bae
School Of Materials Science And Engineering And Nano Systems Institute-national Core Research Center
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Lee Hyo-sung
School Of Materials Science And Engineering And Nano Systems Institute-national Core Research Center
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Kim Byung-sung
School Of Electrical And Computer Engineering Sungkyunkwan University
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Kim Byung-sung
School Of Materials Science And Engineering And Nano Systems Institute-national Core Research Center
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