High-Spatial-Resolution Multichannel Thomson Scattering Measurements for Atmospheric Pressure Microdischarge

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2004-08-01

著者

• Kono Akihiro

  Department Of Electrical Engineering And Computer Science Nagoya University

• IWAMOTO Kazushige

  Department of Electrical Engineering and Computer Science, Nagoya University

• Iwamoto Kazushige

  Department Of Electrical Engineering And Computer Science Nagoya University

関連論文

• Heat Transport Simulation for Atmospheric-Pressure High-Density Microgap Plasma
• High-Spatial-Resolution Multichannel Thomson Scattering Measurements for Atmospheric Pressure Microdischarge
• Dilution-Gas Effect on Electron Density and Temperature in RF SiH_4 Plasma Based on Microwave Cavity Resonance Measurement
• Laser-Induced-Fluorescence Study of the SiH_2 Density in RF SiH_4 Plasmas with Xe, Ar, He, and H_2 Dilution Gases
• Effect of Dilution Gases on the SiH_3 Radical Density in an RF SiH_4 Plasma ( Plasma Processing)
• Laser-Induced-Fluorescence Detection of SiH_2 Radicals in a Radio-Frequency Silane Plasma
• Level Excitation Cross Sections of Atomic Fragments in Low-Energy Electron Impact Dissociation of Group IV Hydrides
• Emission Cross Sections of the Fragments in Dissociative Excitation of Germane by Electron Impact

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