Production of Liquid Cluster Ions for Surface Treatment

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-08-15

著者

• Takaoka Gikan

  Ion Beam Engineering Experimental Laboratory Kyoto University

• Seki Toshio

  Ion Beam Engineering Experimental Laboratory Kyoto University

• Yamamoto Tomoaki

  Ion Beam Engineering Experimental Laboratory Kyoto University

• NOGUCHI Hidetaka

  Ion Beam Engineering Experimental Laboratory, Kyoto University

関連論文

• Ionized Cluster Beams : Physics and Technology
• Effects on CO Oxidation Activity of Nano-Scale Au Islands and TiO_2 Support Prepared by the Ionized Cluster Beam Method
• Epitaxial Growth of TiO_2 Rutile Thin Films on Sapphire Substrates by a Reactive Ionized Cluster Beam Method
• Interaction of SF_6 Cluster Ion Beams with Si Surface : Surfaces, Interfaces, and Films
• Production of Liquid Cluster Ions for Surface Treatment
• Development of Liquid Polyatomic Ion Beam System for Surface Modification : Instrumentation, Measurement, and Fabrication Technology
• Production of Liquid Cluster Ions for Surface Treatment

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