Development of Liquid Polyatomic Ion Beam System for Surface Modification : Instrumentation, Measurement, and Fabrication Technology
スポンサーリンク
概要
- 論文の詳細を見る
We have developed a new type of ion beam system using organic liquid materials, which has several advantages for surface modification based on the different structures of polyatomic ions. Mass-analyzed ion beams can be realized using a compact E × B mass filter. By utilizing different polyatomic ions of organic liquid materials such as ethanol and decane, the wettability of the polycarbonate (PC) surface can be controlled. In addition, the Rutherford backscattering spectrometry (RBS) channeling measurement shows that the fragmentation of the CH_3CHOH ion occurs upon its impact on the Si surface with an incident energy of 6 keV. Thus, liquid polyatomic ion beams have a unique characteristic suitable for surface treatment that does not exist in atomic ion beams.
- 社団法人応用物理学会の論文
- 2002-06-01
著者
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Takaoka Gikan
Ion Beam Engineering Experimental Laboratory Kyoto University
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Yamamoto Tomoaki
Ion Beam Engineering Experimental Laboratory Kyoto University
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TSUMURA Kazumichi
Ion Beam Engineering Experimental Laboratory, Kyoto University
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Tsumura Kazumichi
Ion Beam Engineering Experimental Laboratory Kyoto University
関連論文
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- Epitaxial Growth of TiO_2 Rutile Thin Films on Sapphire Substrates by a Reactive Ionized Cluster Beam Method
- Interaction of SF_6 Cluster Ion Beams with Si Surface : Surfaces, Interfaces, and Films
- Production of Liquid Cluster Ions for Surface Treatment
- Development of Liquid Polyatomic Ion Beam System for Surface Modification : Instrumentation, Measurement, and Fabrication Technology
- Production of Liquid Cluster Ions for Surface Treatment