Sub-300〓(Ba_x,Sr_<1-x>)TiO_3 Films by Metal Organic Chemical Vapor Deposition: Nanostructure, Step Coverage, and Dielectric Properties
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2001-05-01
著者
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Zhao J
Kwansei‐gakuin Univ. Hyogo Jpn
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DORNFEST Charles
Applied Materials
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KHER Shreyas
Applied Materials
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ZHAO Jun
Applied Materials
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DEY Sandwip
Department of Chemical and Materials Engineering, and Center for Solid State Electronics Research, A
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MAJHI Prashant
Department of Chemical and Materials Engineering, and Center for Solid State Electronics Research, A
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SHIN Yong-W.
Department of Chemical and Materials Engineering, and Center for Solid State Electronics Research, A
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TANG Derek
Department of Chemical and Materials Engineering, and Center for Solid State Electronics Research, A
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KIRBY Aaron
Department of Chemical and Materials Engineering, and Center for Solid State Electronics Research, A
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LOU Lee
Applied Materials
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Dey Sandwip
Department Of Chemical And Materials Engineering And Center For Solid State Electronics Research Ari
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Kirby Aaron
Department Of Chemical And Materials Engineering And Center For Solid State Electronics Research Ari
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