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Univ. Hyogo Hyogo Jpn | 論文
- Room-temperature nanoimprint using sol-gel ITO film
- Characterization of nanoimprint resin and antisticking layer by scanning probe microscopy
- Property Improvement of 75nm-thick Directly crystallized SrBi_2Ta_2O_9 Thin Films by Pulse-introduced Metalorganic Chemical Vapor Deposition at Low Temperature : Electrical Properties of Condensed Matter
- Microstructures and Corrosion Resistance of Magnesium Implanted with Nitrogen Ions
- Mitigation of Low Outgassing and Small Line Edge Roughness for EUVL Resist
- Resist Outgassing by EUV Irradiation
- Fabrication of Aspherical Mirrors for Extreme Ultra-Violet Lithography (EUVL) Using Deposition Techniques
- A Novel Design of Three-Aspherical-Mirror Imaging Optics for Extreme Ultra-Violet Lithography
- Responses to Desiccation Stress in Lichens are Different from Those in Their Photobionts
- Heat Treatment Effect on the Polymer Light-Emitting Device Based on Poly (9,9-dioctylfluorene) during the Maskless Dye-Diffusion Technique(Organic molecular devices)
- Photothermal Beam Deflection (PBD) Image of Certain GaAs Wafers
- Effects of vegetation type on habitat use by crop-raiding Japanese macaques during a food-scarce season
- PAG study of PAG bonded resist for EUV and EB lithography
- Mitigation of low LER with PAG bonded resist for EUVL
- Electrical Perception of the 'Death Message' in Chara : Analysis of K^-sensitive Depolarization
- Life-history parameters of a wild group of West African patas monkeys (Erythrocebus patas patas)
- Computational modelling on the stability of new high-pressure phases of MgAl_2O_4 and Al_2SiO_5
- Cation Binding Properties of Benzo-type Crown Ethers. Effect of Ring Size upon Complexation Phenomena
- Carbon Multiprobes with Nanosprings Integrated on Si Cantilever Using Focused-Ion-Beam Technology