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Product Development Laboratory, Mitsubishi Electric Corporation | 論文
- Very Thin Single-Walled Carbon Nanotubes Self-Assembled on 6H-SiC(0001) Substrate by Surface Decomposition Method
- Critical-Dimension Controllability of Chemically Amplified Resists for X-Ray Membrane Mask Fabrication
- Ferromagnetic Domain Structure in La_Sr_xMnO_3 (x=0.125)
- Observation of magnetic domain structure in phaseseparated manganites by Lorentz electron microscopy
- Sub-100-nm Device Fabrication using Proximity X-Ray Lithography at Five Levels
- Mask Error Factor in Proximity X-Ray Lithography
- Development of temperature-control system for liquid droplet using surface Acoustic wave devices
- Use of a low refractive index prism in surface plasmon resonance biosensing
- Dependence of SPR sensor performance on prism material and its importance in biosensor
- I-3 Deposition of thin film based on SAW streaming(Device application (English session))
- P1-27 A study on SAW streaming phenomenon based on temperature measurement and observation of streaming in liquids(Poster session 1)
- High-Performance X-Ray Mask Fabrication Using TaGeN Absorber and Dummy Pattern Method for Sub-100nm Proximity X-Ray Lithography : Instrumentation, Measurement, and Fabrication Technology
- Suppression of Pattern Edge Roughness by Low Ion Strength Developer
- Properties of Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition Using Ru(EtCp)_2 with Tetrahydrofuran Solvent
- Development of dedicated STEM with high stability
- The study of AI-L_23 ELNES with resolution-enhancement software and first-principles calculation
- Spatially-resolved EELS analysis of multilayer using EFTEM and STEM
- A 500℃ fabrication process for MIM capacitors-based on a Ta_2O_5/Nb_2O_5 bilayer with high permittivity-for DRAM and SoC applications
- Fourier images feature of lattice fringes formed by low-loss electrons as observed using spatially-resolved EELS technique
- Nonlinear Vibration of Liquid Droplet by Surface Acoustic Wave Excitation