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Anelva Corporation | 論文
- リモートプラズマによる有機シリコンからのSiCの堆積
- In Situ IR Spectroscopic Study of a-Si:H Films Growing under Photo-Chemical Vapor Deposition Condition : Surfaces, Interfaces and Films
- 24aED-1 光子対ビームによる二光子干渉及び偏光絡み合い(24aED 量子エレクトロニクス(光量子情報処理),領域1(原子・分子,量子エレクトロニクス,放射線物理))
- Operating Characteristics of XHV Sputter Ion Pump
- Two-Dimensional Distributions of Ti and Ti+ Densities in High-Pressure Magnetron Sputtering Discharges
- Bottom Coverage of Cu Deposit for 200-nm-Class Circular Vias with High Aspect Ratios Investigated by Magnetron Sputtering Activated Using Superconducting Bulk Magnet
- Measurements of Power Absorption in a Modified Magnetron-type Discharge
- Downstream Gas Temperature Variation of Glow and Plasmoidal Oxygen Radio Frequency Discharges