Operating Characteristics of XHV Sputter Ion Pump

概要

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In order to develop a sputter ion pump (SIP) which works effectively in the pressure range lower than 10<SUP>-10</SUP> Pa, two types of a 400 L/s SIP, triode type and post type, have been evaluated, and are used in combination with the Zr-V-Fe nonevaporable getter (NEG) module. Activation of the NEG module has been achieved during the bakeout of SIP by a plate heater placed on the outer surface of the SIP body. In the case of post-type SIP with the NEG module, the ultimate pressure of 6×10<SUP>-11</SUP> Pa has been obtained in 1, 000 h from atmospheric pressure with a total of about 24 h of bakeout at 280°C for SIP and the test dome, and at 290°C for activation of the NEG module. Also, Ar conditioning of SIP has been attempted to reduce the ultimate pressure.
日本真空協会の論文
1994-09-20