スポンサーリンク
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan | 論文
- P-MNS-07 NANOTRANSFER METHOD FOR THE FERROELECTRIC FILMS ONTO THE POLYMER SUBSTRATE(Micro/Nanosystem Science and Technology,Technical Program of Poster Session)
- High-k dielectrics for application in broadband radio frequency-microelectromechanical system capacitive shunt switch (特集 強誘電体のセンサ・マイクロマシン応用)
- Characterization and Permeation of Microfabricated Palladium Membrane
- Fabrication of 150-nm-Wide Transducer Gaps for Disk-Type Resonators by Single Dry Etching Process
- Microstructuring of 45-μm-Deep Dual Damascene Openings in SU-8/Si by UV-Assisted Thermal Imprinting with Opaque Mold
- Nanoimprint of Glass Materials with Glassy Carbon Molds Fabricated by Focused-Ion-Beam Etching
- Micro Press Molding of Borosilicate Glass Using Plated Ni–W Molds
- Size Dependence of Quick Cavity Filling Behavior in Ultraviolet Nanoimprint Lithography Using Pentafluoropropane Gas
- Flexible polyimide micropump fabricated using hot embossing (Special issue: Microprocesses and nanotechnology)
- Numerical Simulation of Glass Imprinting for Molding Temperature Prediction
- Assessing Aptitude of Plated Ni–W Film as Mold Materials for Borosilicate Glass
- Microstructuring of Dual Damascene Opening by Hot Embossing Combined with Etch-Back Process
- Ultrasonic Nanoimprint on Poly(ethylene terephthalate) at Room Temperature
- Development of Ni–P-Plated Inconel Alloy Mold for Imprinting on Pyrex Glass
- Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O2 Dry Etching Mask
- Control of Parameters Influencing the Thermal Imprint of Parylene/Silicon
- Nanoimprint Lithography Combined with Ultrasonic Vibration on Polycarbonate
- Preparation and Photovoltaic Properties of Lead Lanthanum Zirconate Titanate in Design of Multilayers
- Photovoltaic Effect of Crystalline-Oriented Lead Lanthanum Zirconate Titanate in Layered Film Structure
- Ultrasonic Nanoimprinting in Organic Spin-on-Glass-Coated Si Substrates