KANDAKA Noriaki | Nikon Corp.
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概要
Nikon Corp. | 論文
- Contouring of polished single-crystal silicon plates by wire electrical discharge machining
- Ultraprecision 5-Axis Control Machining of Fly-Eye Mirror in EUV Lithography
- Smoothing of Diamond-Turned Copper Surfaces Using Ion Beams with Aid of Planarizing Film
- Defect Production in Phosphorus Ion-Implanted SiO_2(43 nm)/Si Studied by a Variable-Energy Positron Beam
- Characterization of Separation-by-Implanted-Oxygen Wafers with Monoenergetic Positron Beams