WATANABE Takehiko | Tokyo Institute of Technology, Graduate School
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概要
Tokyo Institute of Technology, Graduate School | 論文
- Structure of Polycrystalline Silicon Thin Film Fabricated from Fluorinated Precursors by Layer-by-Layer Technique
- Preparation of High-Quality Microcrystalline Silicon from Fluorinated Precursors by a Layer-by-Layer Technique
- Structural and Electrical Properties of n-Type Poly-Si Films Prepared by Layer-by-Layer Technique
- Study on Chemical Reactions on the Growing Surface to Control the Structures of μc-Silicon from Fluorinated Precursors
- Preparation of μc-Si:H/a-Si:H Multilayers and Their Optoelectric Properties