Ogawa Shingo | Toray Research Center Inc., Otsu 520-8567, Japan
スポンサーリンク
概要
関連著者
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Hosoi Takuji
Department Of Electronics And Information Systems Osaka University
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Watanabe Heiji
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Shimura Takayoshi
Department Of Material And Life Science Graduate School Of Engineering Osaka University
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Ogawa Shingo
Toray Research Center Inc., Otsu 520-8567, Japan
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Yamamoto Takashi
Toray Research Center Inc., Otsu 520-8567, Japan
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Kita Koji
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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YAMAMOTO Takashi
Toray Research Center, Inc.
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Saeki Masayuki
Department Of Civil Engineering Faculty Of Science And Technology Tokyo University Of Science
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Uda Tsuyoshi
Advanced Research Laboratory Hitachi Ltd.
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Kitano Naomu
Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Arimura Hiroaki
Department of Material and Life Science, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Ogawa Shingo
Toray Research Center, Inc., Otsu 520-8567, Japan
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Shimura Takayoshi
Department of Material and Life Science, Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan
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Yamamoto Takashi
Toray Research Center, Inc., Otsu 520-8567, Japan
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Uda Tsuyoshi
AdvanceSoft Corporation, Minato, Tokyo 107-0052, Japan
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Tsuji Jun-ichi
Toray Research Center Inc., Otsu 520-8567, Japan
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Tagami Katsunori
AdvanceSoft Corporation, Minato, Tokyo 107-0052, Japan
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Kita Koji
Department of Material Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
著作論文
- Comprehensive Study of the X-Ray Photoelectron Spectroscopy Peak Shift of La-Incorporated Hf Oxide for Gate Dielectrics
- Impact of Thermally Induced Structural Changes on the Electrical Properties of TiN/HfLaSiO Gate Stacks