Okada Makoto | Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo
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- Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogoの論文著者
Graduate School of Science, Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo | 論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Temperature Dependence of Release Effect for Antisticking Layer in Nanoimprint Characterized by Scanning Probe Microscopy
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane