Chen Mao-Chieh | Department of Electronics Engineering, National Chiao-Tung University, 1001 Ta Hsueh Road, Hsinchu 300, Taiwan
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概要
- Chen Mao-Chiehの詳細を見る
- 同名の論文著者
- Department of Electronics Engineering, National Chiao-Tung University, 1001 Ta Hsueh Road, Hsinchu 300, Taiwanの論文著者
関連著者
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CHEN Mao-Chieh
Department of Electronics Engineering & The Institute of Electronics, National Chiao Tung University
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Liang Mong-song
Taiwan Semiconductor Manufacturing Co. Ltd.
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KO Chung-Chi
Taiwan Semiconductor Manufacturing Company
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JANG Syun-Ming
Taiwan Semiconductor Manufacturing Company
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Chiang Chiu-chih
Department Of Electronics Engineering National Chiao-tung University
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Chen Mao-Chieh
Department of Electronics Engineering, National Chiao-Tung University, 1001 Ta Hsueh Road, Hsinchu 300, Taiwan
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Chiang Chiu-Chih
Department of Electronics Engineering, National Chiao-Tung University, 1001 Ta Hsueh Road, Hsinchu 300, Taiwan
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Wu Zhen-cheng
Taiwan Semiconductor Manufacturing Company
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YU Chen-Hua
Taiwan Semiconductor Manufacturing Company
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Wu Zhen-Cheng
Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park Hsinchu, Taiwan
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Liang Mong-Song
Taiwan Semiconductor Manufacturing Company, No. 9, Creation Rd. I, Science-Based Industrial Park HsinChu, Taiwan
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Ko Chung-Chi
Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park Hsinchu, Taiwan
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Liang Mong-Song
Taiwan Semiconductor Manufacturing Company, Science-Based Industrial Park Hsinchu, Taiwan
著作論文
- Physical and Barrier Properties of Plasma-Enhanced Chemical Vapor Deposited $\alpha$-SiC:H Films from Trimethylsilane and Tetramethylsilane
- Physical and Barrier Properties of Plasma-Enhanced Chemical Vapor Deposited $\alpha$-SiCN:H Films with Different Hydrogen Contents