Mohri Mikio | Research Laboratory, Oki Electric Industry Co., Ltd.
スポンサーリンク
概要
関連著者
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Kakinuma Hiroaki
Research Laboratory Oki Electric Industry Co. Lid.
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Kakinuma Hiroaki
The Devices Technology Laboratory Oki Electric Industry Co. Ltd.
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Kakinuma Hiroaki
Research Laboratory Oki Electric Industry Co. Ltd.
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Mohri Mikio
Research Laboratory, Oki Electric Industry Co., Ltd.
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Mohri M
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Sawai H
Lsi Laboratory Mitsubishi Electric Corporation
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SAKAMOTO Masanao
Research Center for Superconducting Materials and Electronics, Osaka University
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Sawai Hideo
Research Labs. Oki Electric Industry Co. Ltd.
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Tsuruoka T
The Authors Are With R & D Department Components Division Oki Electric Industry Co. Ltd.
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Tsuruoka Taiji
Research And Development Division Oki Electric Ind. Co. Ltd.
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Sakamoto Masaaki
Research Laboratory, Oki Electric Industry Co., Ltd.
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Sakamoto M
Research Center For Superconducting Materials And Electronics Osaka University
著作論文
- Very-Low-Temperature Preparation of Poly-Si Films by Plasma Chemical Vapor Deposition Using SiF_4/SiH_4/H_2 Gases
- Plasma Etching of ITO Thin Films Using a CH_4/H_2 Gas Mixture
- Phosphorus Doping Using Electron Cyclotrorn Resonance Plasma for Large-Area Polycrystalline Silicon Thin Film Transistors
- Phosphine Doping Effects in the Plasma Deposition of Polycrystalline Silicon Films