Choi S‐w | Samsung Electronic Co. Ltd. Kyunggi‐do Kor
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概要
Samsung Electronic Co. Ltd. Kyunggi‐do Kor | 論文
- Epitaxial Growth of GaN by Helicon Wave Plasma Assisted Metal Organic Chemical Vapor Deposition Process
- X-Ray Photoelectron Spectroscopy Study of Pt-Oxide Thin Films Deposited by Reactive Sputtering Using O_2/Ar Gas Mixtures
- Flare in Microlithographic Exposure Tools
- Cyclopropyl-containing Photoacid Generators for Chemically Amplified Resists
- Effects of SF_6 Addition to O_2 Plasma on Polyimide Etching