KANEHARA Takao | The authors are with Microsystems Technology Laboratory, Oki Electric Industry Co., Ltd.

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概要

• 同名の論文著者
• The authors are with Microsystems Technology Laboratory, Oki Electric Industry Co., Ltd.の論文著者

関連著者

• Osaka T

  Department Of Applied Chemistry School Of Science And Engineering Waseda University

• Osaka Tetsuya

  Kagami Memorial Laboratory For Materials Science And Technology Waseda University:department Of Appl

• Koiwa Ichiro

  Semiconductor Technology Laboratories Oki Electric Industry Co. Ltd.

• Koiwa Ichiro

  Department Of Applied Chemistry Science And Engineering Waseda University

• Koiwa Ichiro

  The Authors Are With Research And Development Group Oki Electric Industry Co. Ltd.

• Mita J

  Research Laboratory Oki Electric Industry Corporation Ltd.

• Ono S

  Saitama Univ. Urawa‐shi Jpn

• Seki T

  Tokyo Inst. Of Technol. Yokohama‐shi Jpn

• Kanehara T

  Semiconductor Technology Laboratory Research And Development Group Oki Electric Industry Co. Ltd.

• Ono S

  Institute Of Industrial Science University Of Tokyo

• Osaka T

  Graduate School Of Science And Engineering Waseda University

• Osaka Tetsuya

  Department Of Applied Chemistry Science And Engineering Waseda University

• KANEHARA Takao

  The authors are with Microsystems Technology Laboratory, Oki Electric Industry Co., Ltd.

• MITA Juro

  The authors are with Microsystems Technology Laboratory, Oki Electric Industry Co., Ltd.

• OSAKA Tetsuya

  The authors are with the School of Science and Engineering, Waseda University

• ONO Sachiko

  The authors are with Advanced Research Institute for Science and Engineering, Waseda University

• SAKAKIBARA Akira

  The authors are with the School of Science and Engineering, Waseda University

• SEKI Tomonori

  The authors are with the School of Science and Engineering, Waseda University

• Osaka Tetsuya

  Department Of Applied Chemistry Faculty Of Science And Engineering Waseda University

• Sakakibara A

  Department Of Mechanical Engineering Okayama University

• Osaka Tetsuya

  Graduate School Of Advanced Science And Engineering Waseda University

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著作論文

• Crystallization Process of Sr_Bi_Ta_2O_9 Thin Films with Different Crystal Orientation Prepared by Chemical Liquid Deposition Using Alkoxide Precursor(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)

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