Samukawa Seiji | Silicon Systems Research Laboratories Nec Corporation
スポンサーリンク
概要
関連著者
-
Samukawa Seiji
Silicon Systems Research Laboratories Nec Corporation
-
Ohtake Hiroto
Silicon Systems Research Laboratories Nec Corporation
-
SAMUKAWA Seiji
Silicon Systems Research Laboratories, NEC Corporation
-
Noguchi Ko
Ulsi Device Development Laboratory Nec Corporation
-
Noguchi Ko
Ulsi Device Development Laboratories Nec Corporation
-
TSUKADA Tsutomu
Anelva Corporation
-
Malyshev Mikhail
Bell Laboratories Lucent Technologies
-
DONNELLY Vincent
Bell Laboratories, Lucent Technologies
-
Donnelly Vincent
Bell Laboratories Lucent Technologies
-
OIKAWA Hirokazu
ULSI Device Development Laboratories, NEC Corporation
-
Tsukuda T
Sci. Univ. Tokyo Chiba Jpn
-
Tsukada Tsutomu
Anelva Corp.
-
Donnelly Vincent.
Bell Laboratories Lucent Technologies
-
Nashimoto Yasunobu
ULSI Device Development Laboratories,
-
Nashimoto Yasunobu
Ulsi Device Development Laboratories Nec Corporation
-
Oikawa Hirokazu
Ulsi Device Development Laboratories Nec Corporation
-
Donnelly Vincent.M.
Bell Laboratories, Lucent Technologies
-
MALYSHEV Mikhail
Bell Laboratories, Lucent Technologies
-
Oikawa Hilokazu
ULSI Device Development Laboratories, NEC Corporation
著作論文
- Dependence of Electron Energy Distributions on Discharge Pressure in Ultrahigh-Frequency and Inductive-Coupled Cl_2 Plasmas
- Effects of Discharge Frequency in Plasma Etching and Ultrahigh-Frequency Plasma Source for High-Performance Etching for Ultralarge-Scale Integrated Circuits
- Charge-Free and Dopant Dependence-Free Etching Processes Using Non-Maxwellian Electron Energy Distributions in Ultra-High-Frequency Plasma
- Effects of Degree of Dissociation on Aluminum Etching in High-Density Cl_2 Plasmas
- Enhancement of Reactivity in Au Etching by Pulse-Time-Modulated Cl2 Plasma