MALYSHEV Mikhail | Bell Laboratories, Lucent Technologies

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概要

• Malyshev Mikhail V.の詳細を見る
• 同名の論文著者
• Bell Laboratories, Lucent Technologiesの論文著者

関連著者

• Malyshev Mikhail

  Bell Laboratories Lucent Technologies

• Samukawa Seiji

  Silicon Systems Research Laboratories Nec Corporation

• DONNELLY Vincent

  Bell Laboratories, Lucent Technologies

• Donnelly Vincent

  Bell Laboratories Lucent Technologies

• SAMUKAWA Seiji

  Silicon Systems Research Laboratories, NEC Corporation

• MALYSHEV Mikhail

  Bell Laboratories, Lucent Technologies

著作論文

• Effects of Discharge Frequency in Plasma Etching and Ultrahigh-Frequency Plasma Source for High-Performance Etching for Ultralarge-Scale Integrated Circuits

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