Katoh Kazuhisa | Research & Development Lab. Stanley Electric Co. Ltd.
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概要
関連著者
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Katoh Kazuhisa
Research & Development Lab. Stanley Electric Co. Ltd.
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Watanabe Hideo
Sendai Radio Technical College
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Yasui Masaru
Research & Development Lab., Stanley Electric Co. LTD.
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Watanabe Hideo
Sendai National College Of Technology
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Yasui Masaru
Research & Development Lab. Stanley Electric Co. Ltd.
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YASUI Masaru
Research & Development Lab., Stanley Electric Co. Ltd.
著作論文
- Effects of rf Power and Substrate Temperature on Properties of a-SiN_x:H Films Prepared by Glow-Discharge of SiH_4-N_2-H_2
- Plasma-Enhanced Deposition of Silicon Nitride from SiH_4-N_2 Mixture
- Properties of Amorphous Films Prepared from SiH_4-N_2-H_2 Gas Mixture