Yasui Masaru | Research & Development Lab. Stanley Electric Co. Ltd.
スポンサーリンク
概要
関連著者
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Katoh Kazuhisa
Research & Development Lab. Stanley Electric Co. Ltd.
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Watanabe Hideo
Sendai Radio Technical College
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Yasui Masaru
Research & Development Lab., Stanley Electric Co. LTD.
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Yasui Masaru
Research & Development Lab. Stanley Electric Co. Ltd.
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Watanabe Hideo
Sendai National College Of Technology
著作論文
- Plasma-Enhanced Deposition of Silicon Nitride from SiH_4-N_2 Mixture
- Properties of Amorphous Films Prepared from SiH_4-N_2-H_2 Gas Mixture