Shinyashiki Hiroshi | Central Research Institute Mitsubishi Materials Corporation
スポンサーリンク
概要
関連著者
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SHINYASHIKI Hiroshi
Central Research Institute, Mitsubishi Materials Corporation
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Shinyashiki Hiroshi
Central Research Institute Mitsubishi Materials Corporation
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SHINGYOUJI Takayuki
Mitsubishi Materials Silicon Corporation
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SHINGYOUJI Takayuki
Central Research Institute, Mitsubishi Materials Corporation
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Shingyouji T
Mitsubishi Materials Corp. Saitama Jpn
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Shingyouji Takayuki
Central Research Inst. Mitsubishi Materials Corporation
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FURUYA Hisashi
Central Research Inst. Mitsubishi Materials Corporation
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Ishigami Shun-ichiro
Central Research Institute, Mitsubishi Materials Corporation
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石神 俊一郎
三菱マテリアル中央研究所
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Ishigami Shun-ichiro
Central Research Institute Mitsubishi Materials Corporation
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Furuya H
Department Of Electrical Engineering Osaka University
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INUISHI Masahide
Advanced Device Development Dept., Renesas Technology Corp.
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KUROI Takashi
ULSI Development Center, Mitsubishi Electric Corporation
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Tsukamoto K
Univ. Tokyo Tokyo Jpn
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ISHII Satoru
Central Research Institute, Mitsubishi Materials Corporation
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Kuroi T
Ulsi Development Center Mitsubishi Electric Corporation
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Fukumoto K
Hitachi Ltd. Ome Jpn
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Komori Shigeki
Ulsi Laboratory Mitsubishi Electric Corporation
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KUROI Takashi
LSI Laboratory, Mitsubishi Electric Corporation
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KAWASAKI Youji
LSI Laboratory, Mitsubishi Electric Corporation
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KOMORI Shigeki
LSI Laboratory, Mitsubishi Electric Corporation
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FUKUMOTO Kouji
LSI Laboratory, Mitsubishi Electric Corporation
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INUISHI Masahide
LSI Laboratory, Mitsubishi Electric Corporation
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TSUKAMOTO Katsuhiro
LSI Laboratory, Mitsubishi Electric Corporation
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SHINGYOJI Takayuki
Central Research Institute, Mitsubishi Materials Corporation
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Kawasaki Y
Mie Univ. Mie Jpn
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Tsukamoto K
Ulsi Laboratory Mitsubishi Electric Corporation
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Komori Shigeki
Lsi Laboratory Mitsubishi Electric Corporation
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Inuishi Masahide
Advanced Device Development Dept. Renesas Technology Corp.
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Shingyoji Takayuki
Central Research Institute Mitsubishi Materials Corporation
著作論文
- A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
- Metal Impurity Trapping Effect by Stress at Edges of Local Oxidation of Silicon Structure
- Proximity Gettering of Heavy Metals by High-Energy Ion Implantation