Ishigami Shun-ichiro | Central Research Institute Mitsubishi Materials Corporation
スポンサーリンク
概要
関連著者
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FURUYA Hisashi
Central Research Inst. Mitsubishi Materials Corporation
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Ishigami Shun-ichiro
Central Research Institute, Mitsubishi Materials Corporation
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石神 俊一郎
三菱マテリアル中央研究所
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Ishigami Shun-ichiro
Central Research Institute Mitsubishi Materials Corporation
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Furuya H
Department Of Electrical Engineering Osaka University
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SHINGYOUJI Takayuki
Mitsubishi Materials Silicon Corporation
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SHINGYOUJI Takayuki
Central Research Institute, Mitsubishi Materials Corporation
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Shingyouji T
Mitsubishi Materials Corp. Saitama Jpn
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Shingyouji Takayuki
Central Research Inst. Mitsubishi Materials Corporation
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Kawai Yoshinobu
Welding Research Institute Osaka University
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Kawai Yoshinobu
Interdiciplinary Gradate School Of Engineering Sciences Kyushu University
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Kawai Y
Welding Research Institute Osaka University
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SHINYASHIKI Hiroshi
Central Research Institute, Mitsubishi Materials Corporation
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河合 良信
Kyushu Univ. Fukuoka
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Shinyashiki Hiroshi
Central Research Institute Mitsubishi Materials Corporation
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Kondoh H
Ricoh Co. Ltd. Miyagi Jpn
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RYUTA Jiro
Central Research Institute, Mitsubishi Materials Corporation
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Kondoh Hideyuki
Central Research Institute, Mitsubishi Materials Corporation
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Kawai Yukio
Mitsubishi Materials Silicon Corporation
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ISHII Satoru
Central Research Institute, Mitsubishi Materials Corporation
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KAWAI Yukio
Mitubishi Materials Silicon Corporation
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SAITOH Yuichi
Mitubishi Materials Silicon Corporation
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KAWAI Yukio
Central Research Institute, Mitsubishi Materials Corporation
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SHINCYOUJI Takayuki
Central Research Institute, Mitsubishi Materials Corporation
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Ryuta Jiro
Central Research Institute Mitsubishi Materials Corporation
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FURUYA Hisashi
Central Research Institute, Mitsubishi Materials Corporation
著作論文
- Effect of Native Oxide upon Formation of Amorphous SiO_x Layer at the Interface of Directly Bonded Silicon Wafers
- Effect of Interstitial Oxygen on Formation of Amorphous SiO_x Layer in Directly Bonded Czoehralski Silicon Wafers
- A Study of Defect Formation Mechamism at Edges of Local Oxidation of Silicon Structure
- Metal Impurity Trapping Effect by Stress at Edges of Local Oxidation of Silicon Structure
- Stress-Enhanced Diffusion of Boron at the Interface of a Directly Bonded Silicon Wafer