Ootera Hiroki | Advanced Technology R&d Center Mitsubishi Electric Corporation

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概要

• 同名の論文著者
• Advanced Technology R&d Center Mitsubishi Electric Corporationの論文著者

関連著者

• Ootera Hiroki

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• 西川 恵子

  千葉大学大学院融合科学研究科

• 西川 恵子

  千葉大

• NISHIKAWA Kazuyasu

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• OOMORI Tatsuo

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• MARUMOTO Kenji

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• TUDA Mutumi

  Ad Advanced Technology R〓D Center, Mitsubishi Electric Corporation

• Taki Masakazu

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Ootera H

  Mitsubishi Electric Corp. Hyogo Jpn

• Tuda M

  Mitsubishi Electric Corp. Hyogo Jpn

• Tuda Mutumi

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Oomori T

  Mitsubishi Electric Corp. Hyogo Jpn

• Marumoto Kenji

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• KINUGAWA Masaru

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Tsuda M

  Faculty Of Pharmaceutical Sciences Chiba University

• Kinugawa Masaru

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• Oomori Tatsuo

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• Nishikawa Kazuyasu

  Advanced Technology R&D Center, Mitsubishi Electric Corporation, 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan

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著作論文

• Etching for 0.15-μm-Level Patterns with Low Microloading Effect Using Beam Plasmas Generated by Gas Puff Plasma Sources
• A New Cleaning Technique for X-Ray Masks in Alkaline Solutions by Direct Control of Electrochemical Potential

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