NAKANO Kaichiro | Jisso and Production Technologies Research Laboratories, NEC Corporation
スポンサーリンク
概要
関連著者
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SHIRAI Masamitsu
Department of Applied Chemistry, Graduate School of Engineering, Osaka Prefecture University
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MAEDA Katsumi
Jisso and Production Technologies Research Laboratories, NEC Corporation
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NAKANO Kaichiro
Jisso and Production Technologies Research Laboratories, NEC Corporation
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Nakano K
Jisso And Production Technologies Research Laboratories Nec Corporation
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IWASA Shigeyuki
Fundamental and Environmental Research Laboratories, NEC Corporation
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HASEGAWA Etsuo
Fundamental and Environmental Research Laboratories, NEC Corporation
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Maeda Kenichi
Jisso And Production Technologies Research Laboratories Nec Corporation
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Maeda Katsumi
Jisso And Production Technologies Research Laboratories Nec Corporation
著作論文
- Properties and Lithographic Capability of Sulfonium Salts with Aromatic Cyclic Ketone Group for ArF Chemically Amplified Resist
- Design and Lithographic Characteristics of Alicyclic Fluoropolymer for ArF Chemically Amplified Resists