Yamada Masamichi | Optoelectronics Technology Research Laboratory

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概要

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著作論文

Surface Cleaning of Si-Doped/Undoped GaAs Substrates
Real-Time Observations on the Cleaning Process of Patterned GaAs Substrates
Characterization of GaAs-(001) Surface Photo-Oxide Formed by Visible-Light Irradiation
Effect of Atomic Hydrogen on GaAs (001) Surface Oxide Studied by Temperature-Programmed Desorption
Characterization of Oxidized GaAs (001) Surfaces Using Temperature Programed Desorption and X-Ray Photoelectron Speetroscopy
Direct Observation of Species Liberated from GaAs Native Oxides during Atomic Hydrogen Cleaning
Analysis of GaAs MOMBE Reactions by Mass Spectrometry
GaOH : Unstable Species Liberated from GaAs Surface Oxides during Atomic Hydrogen Cleaning
Effects of Electron Beam Irradiation and Subsequent Cl_2 Exposure on Photo-Oxidized c(4×4) GaAs : Mechanism of In Situ EB Lithographic Patterning

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