LEE Nae-Eung | Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan U
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概要
- 同名の論文著者
- Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan Uの論文著者
関連著者
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LEE Nae-Eung
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan U
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Shin Dong
Department of Anatomy, Ajou University School of Medicine
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Shin Myoung
Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Un
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Ahn Jinho
School Of Materials Science And Engineering Hanyang University
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Lee Taeho
School Of Materials Science And Engineering Hanyang University
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Jang Chi
Department Of Materials Engineering And Center For Advanced Plasma Surface Technology Sungkyunkwan U
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Kim Jiyoung
Department Of Radiation Oncology : Brain Korea 21 Project For Medical Science Yonsei University Medi
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Shim Kyu-hwan
Semiconductor Physics Research Center Chonbuk National University
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CHO SU
Department of Pediatrics, Ewha Womans University College of Medicine
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OH Tae
Department of Nano Science and Technology, Sungkyunkwan University
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Baik Sung
School Of Materials Science And Engineering Seoul National University
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NA Sung-Woong
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan U
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Oh Tae
Department Of New Materials Engineering Kookmin University
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Cho Su
Department Of Materials Engineering And Center For Advanced Plasma Surface Technology Sungkyunkwan U
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Kim Duck
Department Of Mechanical Design Engineering Chungnam National University
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Lee N‐e
Sungkyunkwan Univ. Kyunggi‐do Kor
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Lee Nae-eung
Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Un
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Kim Young-woon
School Of Materials Science And Engineering Seoul National University
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KWON Ki
Jusung Engineering
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SONG Young-Joo
Semiconductor Division, Electronics and Telecommunications Research Institute
著作論文
- Dry Etching of TaN/HfO_2 Gate Stack Structure by Cl_2/SF_6/Ar Inductively Coupled Plasma
- ArF Photoresist Deformation in Dual Frequency Superimposed Capacitively Coupled Plasma (DFS-CCP) with Different Frequency Combinations
- Spatial Energy Distributions of Sputtered Atoms and Reflected Particles during Kr^+ and Ar^+ Ion Beam Sputtering of Si and Ge
- Formation of Nickel Silicide Layer on Strained-Si_Ge_/Si(001) using a Sacrificial Si Layer and its Morphological Instability